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The Adixen A300 : Compact multi-process dry pump for etch applications

The Adixen A300 : Compact multi-process dry pump for etch applications
Alcatel Vacuum Technology has launched the Adixen A300 dry pump, which offers the highest pumping speed and a compact, space-saving package for use in a wide range of semiconductor processes. Three times smaller, Adixen A300 is easy to integrate and consumes less energy and water. Adixen A300 uses Alcatel Vacuum Technology’s proven multi-roots technology to achieve pumping speeds well above 300m³/h (5000 l/mm). Multi-Roots technology enables the Adixen A300 to combine two pumps into a single compact system, equivalent to a pump and blower package. Featuring low noise and vibration, acoustic pressure levels are reduced by 65% compared to traditional pumps.

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