A3P Dry vacuum pumps range for Medium applications

The next generation of high performance dry pumps to meet the latest challenges of 300mm Semiconductor applications

A3P Dry vacuum pumps range for Medium applications

A3P range for Medium applications: featuring power savings of up to 50% compared with conventional pumping solutions, the A3P range certainly helps reduce Fab operating costs. Based on field-proven multi-stage roots design, the A3P range provides high reliability within a compact package and a wide range of pumping capacities from 100 to 1000 m3/h. Power consumption of 1 to 1.5 kW, low noise level and Semi S2 compliant.

For more information contact Bruno Risoul at bruno.risoul@adixen.fr

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