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Semicon Japan 2007

See us at Semicon Japan 5-7 December 2007 Booth n° 1A-401 å, ä and ö

Semicon Japan 2007

This year at Semicon Japan, Alcatel Vacuum Technology will present its newest products and solutions for the semiconductor, photovoltaic and MEMS industries on booth n° 1A-401.

 AVT will present on the booth :

Vacuum Pumps

The 1003P : “New lower power consumption dry pumps for medium applications”. Alcatel Vacuum Technology introduces a new range which dramatically reduce Fab operating costs.

The ATP2300M : the new Maglev Turbo Pump for light gases. Alcatel Vacuum Technology introduces its new Maglev Turbo Pump with enhanced performance for light gases : your turbo pump alternative for 200mm & 300mm HDPCVD & Implant applications.

Alcatel Vacuum Technology will present its range of clean pumps too : ACP Series 2 , the final evolution in small dry pumping. 

Helium Leak Detector

You will see for the first time our new dry leak detector for the maintenance in the Semiconductor Industry : the new ASM 310. 

Advanced solution for the SC industry

The Adixen Plasma Sensor APS 500 : a new chemistry monitoring. AVT has brought to market a simple solution for real time monitoring of process gases in vacuum. Optimize your processes ! 

Come and visit us on our booth n° 1A-401, we shall be pleased to share our knowledge and experience while reviewing the Adixen product line !


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