Magnetically Levitated turbo-molecular pumps range for ultra-clean and high reliability secondary vacuum.

With one of the larger number of pumps running in the Semiconductor market worldwide for over 10 years, Adixen Maglev pumps have demonstrated their highest reliability and performance.

Adixen Maglev pumps for Semiconductor covers the range from 400l/s to 3200 l/s, which makes them suitable for most of the Semiconductor applications, including Metal Etch, Oxyde Etch, Poly Etch deposition and Implant. They include 5 axis maglev bearings, ensuring an upmost up time. Adixen maglev pumps’ withstand to process is extended through the possiblity to regulate the pump housing temperature up to 75°C, an efficient Nitrogen purge system and a special coating of the internal parts.

CMS (Control Monitoring System) :

Adixen supervision network CMS (Control Monitoring System) allows the monitoring of any Adixen pump or system installed in your Fab for an efficient management of your installed base.

CMS main features include:
• Compatibility with all Adixen products (dry pumps, Maglev turbos) and associated abatements systems, with a capacity of up to 2500 units.
• Records of pump / system critical parameters
• Display of warnings and alarms
• History of pump / system evolution for troubleshooting and statistical analysis
• Pump setting / configuration modification with access protected by password

CMS (Control Monitoring System)

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