Magnetically Levitated turbo-molecular pumps range for ultra-clean and high reliability secondary vacuum.

With one of the larger number of pumps running in the Semiconductor market worldwide for over 10 years, Adixen Maglev pumps have demonstrated their highest reliability and performance.

Adixen Maglev pumps for Semiconductor covers the range from 400l/s to 3200 l/s, which makes them suitable for most of the Semiconductor applications, including Metal Etch, Oxyde Etch, Poly Etch deposition and Implant. They include 5 axis maglev bearings, ensuring an upmost up time. Adixen maglev pumps’ withstand to process is extended through the possiblity to regulate the pump housing temperature up to 75°C, an efficient Nitrogen purge system and a special coating of the internal parts.

Stand-alone products :

High throughput applications 
Adixen Maglev pumps are designed either for harsh process, high pressure or high throughput pumping needed for dedicated semiconductor applications.

ATH-M Series:
According to your needs, you can choose among our Maglev pumps range: ATH1300M, ATH1600M, ATP2300M, ATH2300M, ATH2800M, ATH3200M.

Stand-alone products

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