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Adixen Magnetically Levitated turbo-molecular pumps range for ultra-clean and high reliability secondary vacuum.

Maglev pumps for photovoltaic applications benefit from Alcatel Vacuum Technology large experience in Semiconductor and Coating applications.

CMS (Control Monitoring System) :

Adixen supervision network CMS (Control Monitoring System) allows the monitoring of any Adixen pump or system installed in your Fab for an efficient management of your installed base.

CMS main features include:
• Compatibility with all Adixen products (dry pumps, Maglev turbos) and associated abatements systems, with a capacity of up to 2500 units.
• Records of pump / system critical parameters
• Display of warnings and alarms
• History of pump / system evolution for troubleshooting and statistical analysis
• Pump setting / configuration modification with access protected by password

CMS (Control Monitoring System)

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