Plattskärmar och solceller

Torra pumpar

Based on mastered multi-stage roots technology, Alcatel Vacuum Technology provides a wide range of high capacity dry pumps covering all requirements of G4 to G9 FPD fabsand Silicon or Thin Film based technology photovoltaic cells manufacturing.

Medium process :

Medium applications include all applications using corrosive & aggressive chemistries, which after reaction in the process chamber may combine in condensable by-products or generate powder. The dry pump ranges below include all the features to warranty the highest pump life time.

The ADKP Series is based on field proven Series 2 ADS602H and ADS1202H, with a robust top roots blower to increase the pumping speed up to 3 700 m3/h. Special versions of the ADS are available to increase either the maximum volume to be evacuated, hydrogen pumping speed or maximum continuous inlet flow.

The ADKP range offers :
• High pumping speeds
• Wide process range capabilities including NF3 cleans
• Low footprint (1 m²)
• Easy maintenance with separate wheel mounted frames

Medium process

Andra applikationsområden :

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