Plattskärmar och solceller

Torra pumpar

Based on mastered multi-stage roots technology, Alcatel Vacuum Technology provides a wide range of high capacity dry pumps covering all requirements of G4 to G9 FPD fabsand Silicon or Thin Film based technology photovoltaic cells manufacturing.

Harsh process :

Harsh applications include PECVD processes generating large quantities of powder and using NF3 cleans. ADKH range are the right choice for such applications. Using a new high capacity dry pump and an optimized combination of roots blowers, peak pumping speeds from 2 100 to 4 800 m3/h are available, with high maximum continuous flows.

The ADKH range offers:
• High pumping speeds
• Highest protection against powder and highly corrosive gases
• Low utilities consumption
• Easy maintenance with separate wheel mounted frames.

Harsh process

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