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Molecular decontamination and protection for carriers and substrates

Adixen Pod Regenerator (APR)

Solution to global defect reduction in I.C. Fabs by eliminating AMC and regenerating PODs

An ultimate solution against Airborne Molecular Contamination (AMC).

Adixen POD Regenerator
(APR) for <130 nm nodes decontaminates wafers and their carrier providing molecular decontamination and active protection in one go.

Benefits
- Stops crystal growth / Corrosion
- Relax queue time rules and simplifies storage management.
- Eliminates AMC such as HF, HCl, VOC in carrier environment and on the substrate.
- Removes Air & Halogen & organic compounds
- Protects carrier and substrate within from contaminated environments for days.
- Suppresses fab cross contamination risks
- Low CoO.

Assurance to the yield improvement.


For more information, please contact Roland BERNARD: roland.bernard@adixen.fr
Adixen Pod Regenerator (APR)

Dokumentation :

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