Molecular contamination monitoring tool for carriers and substrates

Adixen Pod Analyser (APA)

Solution to global defects reduction in 200 / 300 mm I.C.Fabs by monitoring environments

Adixen Pod Analyser (APA) measures POD environment quality in real time with ppbv level sensitivity. It is designed to provide Advanced Solutions in today’s and future clean room technology.

Provides benefits to all contamination sensitive work spaces.
- Cleaning Strategy: POD cleaning efficiency for AMC verification, POD life time survey
- Process Control: equipment and process AMC contamination analysis, yield improvement
- Queue-time: process queue time outgassing analysis, queue time optimization, throughput improvement
- Fab production oriented user interface
- Identify fab cross contamination risks
- Real time measurement in a few minutes

For more information, please contact Roland BERNARD:
Adixen Pod Analyser (APA)

Dokumentation :

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